Thermally tunable integrated optical ring resonator with poly-Si thermistor

Journal of Lightwave Technology

Volumn 14, Issue 10, 1996, Pages 2260-2267

  Heimala, Päivi ^a,d,e   Katila, Pekka ^a,f   Aarnio, Jaakko ^a,b,f   Heinämäki, Arja ^a,c  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b NOKIA RESEARCH CENTER   (United States)

^c NOKIA SIEMENS NETWORKS   (Finland)

^d UNIVERSITY OF HELSINKI   (Finland)

^e Photonics Group   (Finland)

^f AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC LOSSES; FABRICATION; INTEGRATED OPTICS; OPTICAL SENSORS; OPTICAL WAVEGUIDES; RESISTORS; SEMICONDUCTING SILICON; SILICON NITRIDE; TEMPERATURE MEASUREMENT; THERMISTORS;

RIB WAVEGUIDES; RING RESONATOR; THERMOOPTIC HEATING ELEMENT; THIN FILM HEATER;

OPTICAL RESONATORS;

EID: 0030262760     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.541217     Document Type: Article

References (27)

1. M. Haruna and J. Koyama, "Thermooptic deflection and switching in glass," Appl. Opt., vol. 21, pp. 3461-3465, 1982.
2. C. C. Lee and T. J. Su, "2 × 2 single-mode zero-gap directional-coupler thermo-optic waveguide switch on glass," Appl. Opt., vol. 30, pp. 7016-7022, 1994.
3. M. Hoffmann and E. Voges, "Thermo-optical digital switches on silicon," in Proc. 7th European Conf. Integr. Opt. ECIO'95, Delft, The Netherlands, Apr. 1995, pp. 403-406.
4. M. Okuno, K. Kato, Y. Ohmori, M. Kawachi, and T. Matsunaga, "Improved 8 × 8 integrated matrix switch using silica-based planar lightwave circuits," J. Lightwave Technol., vol. 12, pp. 1597-1606, 1994.
5. T. Kitoh, N. Takato, K. Jinguji, M. Yasu, and M. Kawachi, "Novel broad-band optical switch using silica-based planar lightwave circuit," IEEE Photon Technol. Lett., vol. 4, pp. 735-737, 1992.
6. N. Takato, T. Kominato, A. Sugita, K. Jinguji, H. Toba, and M. Kawachi, "Silica-based integrated optic Mach-Zehnder multi/demultiplexer family with channel spacing of 0.01-250 nm," J. Lightwave Technol., vol. 8, pp. 1120-1127, 1990.
7. K. Sasayama and K. Habara, "Photonic FDM highway switch using PLC ring resonators," in Proc. 19th European Conf. Optic. Commun. ECOC'93, Montreux, Switzerland, Sept. 1993, vol. 2, pp. 545-548.
8. T. Kominato, Y. Hibino, and K. Onose, "Silica-based finesse-variable ring resonator," IEEE Photon. Technol. Lett., vol. 5, pp. 560-562, 1993.
9. K. Takiguchi, K. Okamoto, S. Suzuki, and Y. Ohmori, "Planar lightwave circuit optical dispersion equalizer," IEEE Photon. Technol. Lett., vol. 6, pp. 86-88, 1994.
10. G. Ulbers, "An integrated optics sensor on silicon for the measurement of displacement, force and refractive index," in Proc. SPIE, 1991, vol. 1506, pp. 99-110.
11. A. Sugita, K. Jinguji, N. Takato, K. Katoh, and M. Kawachi, "Bridgesuspended silica-waveguide thermo-optic phase shifter and its application to Mach-Zehnder type optical switch," Trans. IEICE, vol. E73, pp. 105-108, 1990.
12. 0 = 0.85 μm," in Proc. 17th European Conf. Optic. Commun. ECOC'91, Paris, France, 1991, pt. 1, pp. 229-232.
13. R. Adar, M. R. Serbin, and V. Mizraki, "Less than 1 dB per meter propagation loss of silica waveguides measured using a ring resonator," J. Lightwave Technol., vol. 12, pp. 1369-1372, 1994.
14. R. G. Walker and C. D. W. Wilkinson, "Integrated optical ring resonators made by silver ion-exchange in glass," Appl. Opt., vol. 22, pp. 1029-1035, 1982.
15. J. Haavisto and G. A. Pajer, "Resonance effects in low-loss ring waveguides," Opt. Lett., vol. 5, pp. 510-512, 1980.
16. G. N. De Brabander, J. T. Boyd, and G. Beheim, "Integrated optic ring resonator with micromechanical diaphragm for pressure sensing," IEEE Photon. Technol. Lett., vol. 6, pp. 671-673, 1994.
17. 2-doped silica waveguides," J. Lightwave Technol., vol. 12, pp. 1781-1788, 1992.
18. J. Aarnio, "Optical integrated structures and circuits on silicon," VTT Publications 106, Dissertation, VTT Tech. Res. Cent. of Finland, 1992.
19. P. K. Tien, "Light waves in thin films and integrated optics," Appl. Opt., vol. 10, pp. 2395-2413, 1971.
20. D. Marcuse, "Mode conversion caused by surface imperfections of a dielectric slab waveguide," Bell Syst. Tech. J., vol. 48, pp. 3187-3215, 1969.
21. G. Grand and S. Valette, "Optical polarizers of high extinction ratio integrated on oxidised silicon," Electron. Lett., vol. 20, pp. 730-731, 1984.
22. H. Nishihara, M. Haruna, and T. Suhara, Optical Integrated Circuits. New York: McGraw-Hill, 1989, pp. 124-127.
23. D. R. Croft and D. G. Lilley, Heat Transfer Calculations Using Finite Difference Equations. London, England: Applied Science Publishers Ltd., 1977.
24. G. Sewell, "PDE2D: Easy-to-use software for general two-dimensional partial differential equations," Adv. Eng. Software, vol. 17, pp. 105-112, 1993.
25. A. S. Grove, Physics and Technology of Semiconductor Devices. New York: Wiley, 1967, pp. 102-103.
26. 2 optical waveguides on Si," Appl. Opt., vol. 26, pp. 2621-2624, 1987.
27. Y. Inoue, K. Katoh, and M. Kawachi, "Polarization sensitivity of a silica waveguide thermooptic phase shifter for planar lightwave circuits," IEEE Photon. Technol. Lett., vol. 4, pp. 36-38, 1992.