Dielectric properties of Al2O3 thick films grown by aerosol deposition method

Journal of the Korean Ceramic Society

Volumn 45, Issue 7, 2008, Pages 411-417

  Park, Jae Chang ^a,c   Yoon, Young Joon ^a   Kim, Hyo Tae ^a   Koo, Eun Hae ^a   Nam, Song Min ^b   Kim, Jong Hee ^a   Shim, Kwang Bo ^c  

^a Korea Institute of Ceramic Engineering and Technology (KICET)   (South Korea)

^b Kwangwoon University   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

Aerosol deposition; Al2O3; Integrated substrate; Thick film

Indexed keywords

AEROSOLS; ALUMINA; ALUMINUM; CERAMIC MATERIALS; CRYSTAL STRUCTURE; DEPOSITION; PERMITTIVITY; POWDERS; RESPIRATORY MECHANICS; SUBSTRATES; THICK FILMS;

AEROSOL DEPOSITION; AEROSOL DEPOSITION METHOD; FABRICATION PROCESS; INTEGRAL SUBSTRATE; INTEGRATED SUBSTRATE; NOVEL TECHNIQUES; RELATIVE PERMITTIVITY; STARTING POWDERS;

DIELECTRIC PROPERTIES;

EID: 53849116457     PISSN: 12297801     EISSN: None     Source Type: Journal    
DOI: 10.4191/KCERS.2008.45.7.411     Document Type: Article

References (11)

1. 3 Thick Films By Aerosol Deposition Method for Integrated RF Modules," J. Kor. Ceram. Soc., 40 [8] 715-19 (2003).
2. 3 Thick Films Prepared for Microactuators by Aerosol Deposition," Appl. Phys. Lett., 77 1710-12 (2000).
3. J. Akedo, M. Lebedev, A. Iwata, H. Ogiso, and S. Nakano, "Aerosol Deposition Method (ADM) for Nano-Crystal Ceramics Coating Without Firing," Mater. Res. Soc. Symp. Proc., 778 289-99 (2003).
4. A. Iwata, J. Akedo, and M. Lebedev, "Cubic Aluminum Nitride Transformed Under Reduced Pressure Using Aerosol Deposition Method," J. Am. Ceram. Soc., 88 [4] 1067-69 (2005).
5. J-H, Park, J. Akedo, and M. Nakada, "Surface Plasmon Resonance in Novel Nanocomposite Gold/Lead Zirconate Titanate Films Prepared By Aerosol Deposition Method," Jpn. J. App. Phy., 45 7512-15 (2006).
6. J. Akedo and M. Lebedev, "Powder Preparation in Aerosol Deposition Method for Lead Zirconate Titanate Thick Films," Jpn. J. Appl. Phys., 41 6980-84 (2002).
7. J. Akedo, "Aerosol Deposition of Ceramic Thick Films at Room Temperature : Densification Mechanism of Ceramic Layers," J. Am. Ceram. Soc., 89 [6] 1834-39 (2006).
8. K. C. Kao, "Dielectric Phenomena in Solids.," pp. 75-78, Elsevier academic press, US, 2004.
9. S. J. Penn, N. McN. Alford, A. Templeton, X. Wang, M. Xu, M. Reece, and K. Schrapel, "Effect of Porosity and Grain Size on the Microwave Dielectric Properties of Sintered Alumina.," J. Am. Ceram. Soc., 80 [7] 1885-88 (1997).
10. G. Arit, D. Hennings, and G. De With, "Dielectric Properties of Fine-grained Barium Titanate Ceramics," J. Appl. Phys., 58 1619-25 (1985).
11. 3 Prepared by a Sol-crystal Method," J. Mat. Sci., 32 4053-60 (1997).