Comparison of near-infrared and Raman spectroscopy for on-line monitoring of etchant solutions directly through a Teflon tube

Analytica Chimica Acta

Volumn 629, Issue 1-2, 2008, Pages 119-127

  Kim, Jaejin ^a   Hwang, Jinyoung ^a   Chung, Hoeil ^a  

^a Hanyang University   (South Korea)

Author keywords

Etchant solution; Moving window partial least squares; Near infrared spectroscopy; Prediction robustness; Raman spectroscopy; Spectral selectivity

Indexed keywords

ARCHITECTURAL ACOUSTICS; INFRARED DEVICES; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SPECTRUM ANALYSIS;

ETCHANT SOLUTION; MOVING WINDOW PARTIAL LEAST SQUARES; NEAR-INFRARED SPECTROSCOPY; PREDICTION ROBUSTNESS; SPECTRAL SELECTIVITY;

INFRARED SPECTROSCOPY;

ACETIC ACID; NITRIC ACID; PHOSPHORIC ACID; POLITEF;

ARTICLE; CONTROLLED STUDY; NEAR INFRARED SPECTROSCOPY; ONLINE MONITORING; PRIORITY JOURNAL; RAMAN SPECTROMETRY; SENSITIVITY AND SPECIFICITY;

EID: 53649088890     PISSN: 00032670     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.aca.2008.09.032     Document Type: Article

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