Synthesis of aligned carbon nanotubes film by plasma-enhanced hot filament chemical vapor deposition

Guangxue Xuebao/Acta Optica Sinica

Volumn 28, Issue 9, 2008, Pages 1824-1827

  Zhu, Qingfeng ^a   Zhang, Haiyan ^a   Chen, Yiming ^a   Chen, Yuting ^a   Chen, Liechun ^a   Yang, Dayong ^a  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Aligned carbon nanotubes film; Low temperature preparation; PE HF CVD; Spin coating; Thin film optics

Indexed keywords

CARBON FILMS; FILAMENTS (LAMP); HYDROGEN; METHANE; NANOCOMPOSITES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTUBES; NICKEL ALLOYS; NITRATES; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SILICON; SPIN COATING; SYNTHESIS (CHEMICAL); VAPORS;

ALIGNED CARBON NANOTUBES FILM; LOW TEMPERATURE PREPARATION; PE-HF-CVD; THIN FILM OPTICS;

CARBON NANOTUBES;

EID: 53649084674     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: 10.3788/AOS20082809.1824     Document Type: Article

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