Thickness dependence of submicron thick Pb(Zr0.3Ti0.7)O3 films on piezoelectric properties

Ceramics International

Volumn 34, Issue 8, 2008, Pages 1909-1915

  Kim, Dong Joo ^a   Park, Jung Hyun ^a   Shen, Dongna ^a   Lee, Joo Won ^a   Kingon, Angus I ^b   Yoon, Young Soo ^c   Kim, Seung Hyun ^d  

^a AUBURN UNIVERSITY   (United States)

^b North Carolina State University   (United States)

^c Konkuk University   (South Korea)

^d INOSTEK Inc   (South Korea)

Author keywords

A. Sol gel processes; C. Piezoelectric properties; D. PZT

Indexed keywords

ELECTRIC PROPERTIES; LEAD; ZIRCONIUM;

A. SOL-GEL PROCESSES; C. PIEZOELECTRIC PROPERTIES; D. PZT; POLY-CRYSTALLINE; SUB MICRONS; THICKNESS DEPENDENCES;

LEAD ALLOYS;

EID: 53449086306     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2007.07.016     Document Type: Article

References (24)

1. 3 thin films as a function of composition. J. Mater. Res. 14 (1999) 4307-4318
2. Lefki K., and Dormans G.J.M. Measurement of piezoelectric coefficients of ferroelectric thin films. J. Appl. Phys. 76 (1994) 1764-1767
3. Xu F., Trolier-McKinstry S., Ren W., Xu B., Xie Z.-L., and Hemker K.J. Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films. J. Appl. Phys. 89 (2001) 1336-1348
4. Kholkin A. Non-linear piezoelectric response in lead zirconate-titanate (PZT) films. Ferroelectrics 238 (2000) 235-243
5. Chu F., Xu F., Shepard J.J., and Trolier-McKinstry S. Thickness depedence of the electrical properties of sol-gel derived lead zirconate titanate thin films with (1 1 1) and (1 0 0) texture. Proceedings of the Materials Research Society Symposium, vol. 493 (1998) 409-414
6. 3 thin films. Proceedings of the Materials Research Society Symposium, vol. 596 (2000) 499-504
7. Park J.H., and Trolier-McKinstry S. Dependence of dielectric and piezoelectric properties on film thickness for highly {1 0 0}-oriented lead magnesium niobate-lead titanate (70/30) thin films. J. Mater. Res. 16 (2001) 268-275
8. Cross L.E. Ferroelectric Ceramics (1993), Birkhauser, Berlin
9. 3 thin films as a function of composition. J. Appl. Phys. 93 (2003) 5568-5575
10. Kim S.-H., Kim D.-J., Streiffer S.K., and Kingon A.I. Preparation and ferroelectric properties of mixed composition layered lead zirconate titanate thin films for nonvolatile memory applications. J. Mater. Res. 14 (1999) 2476-2483
11. Tagantsev A.K., Landivar M., Colla E., and Setter N. Identification of passive layer in ferroelectric thin films from their switching parameters. J. Appl. Phys. 78 (1995) 2623-2630
12. Tagantsev A.K., and Stolichnov I.A. Injection-controlled size effect on switching of ferroelectric thin films. Appl. Phys. Lett. 74 (1999) 1326-1328
13. Zhang Q.M., Wang H., Kim N., and Cross L.E. Direct evaluation of domain-wall and intrinsic contributions to the dielectric and piezoelectric response and their temperature dependence on lead zirconate-titanate ceramics. J. Appl. Phys. 75 (1994) 454-459
14. Zhang X.L., Chen Z.X., Cross L.E., and Schulze W.A. Dielectric and piezoelectric properties of modified lead titanate zirconate ceramics from 4.2 to 300 K. J. Mater. Sci. 18 (1983) 968-972
15. Damjanovic D. Stress and frequency dependence of the direct piezoelectric effect in ferroelectric ceramics. J. Appl. Phys. 82 (1997) 1788-1797
16. Taylor D.V., and Damjanovic D. Evidence of domain wall contribution to the dielectric permittivity in PZT thin films at sub-switching fields. J. Appl. Phys. 82 (1997) 1973-1975
17. 3 films. Appl. Phys. Lett. 68 (1996) 2577-2579
18. Polcawich R.G., and Trolier-McKinstry S. Piezoelectric and dielectric reliability of lead zirconate titanate thin films. J. Mater. Res. 15 (2000) 2505-2513
19. Madou M.J. Fundamentals of Microfabrication (1997), CRC Press, Boca Raton, FL
20. 3/Pt thin-film stacks for integrated ferroelectric capacitors. J. Appl. Phys. 78 (1995) 1926-1933
21. 3+z thin films grown by chemical vapor deposition. J. Appl. Phys. 86 (1999) 4565-4575
22. Sengupta S.S., Park S.M., Payne D.A., and Allen L.H. Origins and evolution of stress development in sol-gel derived thin layers and multideposited coatings of lead titanate. J. Appl. Phys. 83 (1998) 2291-2296
23. 3 thin films, in: O.A. a. R. Waser (Ed.), Science and Technology of Electroceramic Thin Films, NATO ASI Series, Series E: Applied Sciences, vol. 284, 1985, pp. 117-132.
24. Kumazawa T., Kumagai Y., Miura H., and Kitano M. Effect of external stress on polarization in ferroelectric thin films. Appl. Phys. Lett. 72 (1998) 608-610