Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrate

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 5, 2008, Pages 1821-1823

  Tharp, J S ^a   Shelton, D J ^a   Wadsworth, S L ^a   Boreman, G D ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM FLUORIDE; PERIODIC ARRAYS; SUB MICROMETERS;

BARIUM; ELECTRON BEAM LITHOGRAPHY;

BARIUM COMPOUNDS;

EID: 53349122306     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2966431     Document Type: Article

References (9)

1. B. Monacelli, J. Pryor, B. Munk, D. Kotter, and G. Boreman, IEEE Trans. Antennas Propag. 53, 745 (2005).
2. J. Tharp, J. Lopez-Alonso, J. Ginn, B. Lail, C. Middleton, B. Munk, and G. Boreman, Opt. Lett. 31, 2687 (2006).
3. D. Shelton, J. Tharp, G. Zummo, W. Folks, and G. Boreman, J. Vac. Sci. Technol. B 25, 1827 (2007).
4. D. T. Morelli and J. Heremans, J. Appl. Phys. 63, 573 (1988).
5. CRC Handbook of Chemistry and Physics, 84th ed. (CRC, Boca Raton, FL, 2003).
6. T. E. Thorpe, A Dictionary of Applied Chemistry (Longmans, Green, New York, 1921).
7. B. E. Maile, W. Henschel, H. Kurz, B. Rienks, R. Polman, and P. Kaars, Jpn. J. Appl. Phys., Part 1 39, 6836 (2000).
8. S. Shimizu, T. Saitoh, M. Uzawa, M. Yuasa, K. Yano, T. Maruyama, and K. Wantanbe, Synth. Met. 85, 1337 (1997).
9. D. J. Perettie, M. F. McCulloch, and P. E. Garrou, Proc. SPIE 1665, 331 (1992).