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Volumn , Issue , 2007, Pages 778-781
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Packaging carbon nanotube based infrared detector
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Author keywords
IR sensors; Nanotube; Packaging; Parylene C; Single CNT
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Indexed keywords
ABSORPTION;
CARBON DIOXIDE;
CARBON NANOTUBES;
CHIP SCALE PACKAGES;
ELECTRONIC EQUIPMENT MANUFACTURE;
ELECTRONICS PACKAGING;
INFRARED ABSORPTION;
INFRARED DETECTORS;
LASERS;
NANOCOMPOSITES;
NANOPORES;
NANOSTRUCTURED MATERIALS;
NANOSTRUCTURES;
NANOTUBES;
NONMETALS;
OPTICAL DESIGN;
OPTICAL SENSORS;
OXYGEN;
SENSORS;
TECHNOLOGY;
THICK FILMS;
THIN FILM DEVICES;
THIN FILMS;
CARBON NANOTUBE;
CURRENT CHANGE;
DRY ICE;
I-V CHARACTERISTICS;
INFRARED(IR);
INSULATING LAYERS;
INTERNATIONAL CONFERENCES;
IR DETECTORS;
IR LASERS;
IR SENSING;
IR SENSORS;
IR-ABSORPTION;
IR-RADIATION;
LONG TIME;
LONG-TERM STABILITY;
MOISTURE ENVIRONMENT;
NANOTUBE;
NEAR-IR;
OXYGEN BARRIERS;
PACKAGING;
PARYLENE C;
PIN HOLES;
RELIABLE PERFORMANCE;
SENSING CURRENTS;
SENSOR CHIPS;
SINGLE CNT;
THIN FILM SUBSTRATE;
TRANSMISSION PROPERTIES;
NANOTECHNOLOGY;
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EID: 52949132288
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/NANO.2007.4601301 Document Type: Conference Paper |
Times cited : (18)
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References (7)
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