Modeling and control of a new actuation mechanism for interfacial force microscopy

Proceedings of the American Control Conference

Volumn , Issue , 2008, Pages 2052-2057

  Mesbah Nejad, A ^a   Moallem, M ^b   Patel, R V ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

^b SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTED PARAMETER CONTROL SYSTEMS; MECHANISMS; TORSIONAL STRESS;

ACTUATION MECHANISM; ANALYTICAL RESULTS; DYNAMIC OUTPUT FEEDBACK CONTROLLERS; FORCE SENSORS; INTERFACIAL FORCE MICROSCOPY; MODELING AND CONTROL; NEW MODEL; SIMULATION RESULTS; TORSION BARS;

SENSORS;

EID: 52449117768     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2008.4586795     Document Type: Conference Paper

References (9)

1. G. Binning, C. F. Quate, and C. Gerber, "Atomic force microscope," Physical Review Letters, vol. 56, no. 9, pp. 930-933, March 1986.
2. J. E. Houston, Interfacial Force Microscopy: Selected Applications, 1st ed., ser. NanoScience and Technology. Springer, 2004, vol. Applied Scanning Probe Methodes, ch. 2, pp. 41-73.
3. S. Joyce, J. Houston, and B. Smith, "Interfacial force sensor with force-feedback control," Electron Devices Meeting, Technical Digest., International, pp. 621-624, Dec 1990.
4. S. A. Joyce and J. E. Houston, "A new force sensor incorporating force-feedback control for interfacial force microscopy," Review of Scientific Instruments, vol. 62, no. 3, pp. 710-715, March 1991.
5. M. W. Spong, S. Hutchinson, and M. Vidyasagar, Robot Modelling and Control. John Wiley & Sons, Inc., 2006.
6. J. Israelachvili, Intermolecular and Surface Forces. New York: Academic Press, 1995.
7. G. Schitter, P. Menold, H. F. Knapp, F. Allgöwer, and A. Stemmer, "High performance feedback for fast scanning atomic force microscopes," Review of Scientific Instruments, vol. 72, no. 8, pp. 3320-3326, 2001.
8. X. Chen and A. Lal, "Integrated pressure and flow sensor in silicon-based ultrasonic surgical actuator," in IEEE Ultrasonics Symposium, vol. 2, Oct 2001, pp. 1373-1376.
9. O. Warren, J. Graham, and P. Norton, "Tapping mode imaging with an interfacial force microscope," Review of Scientific Instruments, vol. 68, no. 11, pp. 4124-4130, 1997.