Molecular ion implanter equipped with liquid-metal alloy ion source

Review of Scientific Instruments

Volumn 71, Issue 2 II, 2000, Pages 780-782

  Gotoh, Y ^a   Tsuji, H ^a   Ishikawa, J ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5244250179     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150292     Document Type: Article

References (13)

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