Sequential parylene lift-off process for selective patterning of biological materials

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 501-504

  Kuribayashi, K ^a   Hiratsuka, Y ^b   Yamamura, T ^a   Takeuchi, S ^a,c  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; PROTEINS; SUBSTRATES;

CYLINDRICAL STRUCTURE; GLASS SUBSTRATES; HIGH-DENSITY PATTERNING; LIFT-OFF PROCESS; MICRO-HOLE ARRAYS; PROTEIN CHIP; SELECTIVE PATTERNING; THIN SHEET;

BIOLOGICAL MATERIALS;

EID: 52249111353     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433114     Document Type: Conference Paper

References (9)

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