Vibration insensitive 3D-profilometry: A new type of white light interferometric microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7064, Issue , 2008, Pages

  Cohen Sabban, J ^a   Reolon, D ^a  

^a STIL SA   (France)

Author keywords

3D profilometry; High resolution; Vibration insensitive; White light interferometry

Indexed keywords

PROFILOMETRY; SPECTROSCOPIC ANALYSIS; VIBRATIONS (MECHANICAL);

3-D PROFILOMETRY; HIGH RESOLUTION; INTERFEROMETRIC MICROSCOPY; MEASUREMENT ACCURACY; PHASE-SHIFTING ALGORITHM; SPECTRAL INTERFEROMETRIC; VIBRATION INSENSITIVE; WHITE-LIGHT INTERFEROMETRY;

INTERFEROMETRY;

EID: 52249100953     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.797431     Document Type: Conference Paper

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