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Volumn 5252, Issue , 2004, Pages 381-390

High resolution metrology of optical components by spectral interferometry

Author keywords

Aspherical surfaces; Dispersion measurements; Optical profilometry; White light interferometry

Indexed keywords

ASPHERICAL SURFACES; DISPERSION MEASUREMENTS; OPTICAL PROFILOMETRY; WHITE LIGHT INTERFEROMETRY;

EID: 1942510443     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.513400     Document Type: Conference Paper
Times cited : (1)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.