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Volumn 5252, Issue , 2004, Pages 381-390
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High resolution metrology of optical components by spectral interferometry
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Author keywords
Aspherical surfaces; Dispersion measurements; Optical profilometry; White light interferometry
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Indexed keywords
ASPHERICAL SURFACES;
DISPERSION MEASUREMENTS;
OPTICAL PROFILOMETRY;
WHITE LIGHT INTERFEROMETRY;
ASPHERICS;
DATA PROCESSING;
DEFORMATION;
GRADIENT INDEX OPTICS;
INTERFEROMETRY;
LENSES;
MIRRORS;
PARAMETER ESTIMATION;
PROBLEM SOLVING;
SPECTROSCOPIC ANALYSIS;
WAVEFRONTS;
OPTICAL SYSTEMS;
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EID: 1942510443
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.513400 Document Type: Conference Paper |
Times cited : (1)
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References (8)
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