High accuracy miniature pressure transducer

Proceedings of the International Instrumentation Symposium

Volumn 470, Issue , 2007, Pages 303-318

  Kurtz, Anthony D ^a   Ned, Alexander A ^a   VanDeWeert, Joseph ^a   Carter, Steve ^b  

^a Kulite Semiconductor Products Inc

^b Arnold Engineering Development Center ^*

Author keywords

[No Author keywords available]

Indexed keywords

AIR FLOWS; DIGITAL ELECTRONICS; ENVIRONMENTAL CONDITIONING; FINITE ELEMENT MODELING; FULL SCALE; HIGH RESOLUTIONS; HIGH-ACCURACY; HIGHLY SENSITIVE; INSTRUMENTATION , SYSTEMS , AND AUTOMATION SOCIETY; LOW PRESSURE; MINIATURE PRESSURE; NOVEL ALGORITHMS; NUMEROUS APPLICATIONS; OPTIMAL PRESSURE; PIEZO-RESISTORS; PIEZORESISTIVE PRESSURE; SENSOR CHIPS; SENSOR GEOMETRIES; SENSOR OUTPUTS; SILICON ON INSULATOR STRUCTURES; TEMPERATURE COMPENSATIONS; TEMPERATURE VARIATIONS; WIDE TEMPERATURE RANGE;

AMPLIFICATION; DIGITAL ARITHMETIC; DIGITAL INTEGRATED CIRCUITS; ELECTRONICS INDUSTRY; FINITE ELEMENT METHOD; HIGH TEMPERATURE TESTING; INSTRUMENTS; INTEGRATED CIRCUITS; MICROSENSORS; NONMETALS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SENSORS; SILICON;

TRANSDUCERS;

EID: 52049110793     PISSN: 15588041     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Kurtz, A.D., "Development and Application of High Temperature Ultra Miniature Pressure Transducers." Fundamentals of Aerospace Instrumentation (ISA) Volume 3 1970.
2. Kurtz, A.D., Ned, A.A., US Patent #5,286,671, "Fusion Bonding Technique for Use in Fabricating Semiconductor Devices " issued in 1994 to Kulite Semiconductor Products, Inc., Leonia, NJ.
3. Ned, A.A., Kurtz, A.D., "High Temperature Silicon on Insulated Silicon Pressure Sensors with Improved Performance Through Diffusion Enhanced Fusion (DEF) Bonding", International Instrumentation Symposium, Reno. NV, June 1998.
4. Kurtz, A.D., Ned, A.D., US Patent #5,955,771, "Sensor for Use in High Vibrational Applications and Methods for Fabricating Same" issued in 1999 to Kulite Semiconductor Products, Inc. Leonia, NJ.
5. th International Instrumentation Society, Albuquerque, NM, May 1999.
6. Kurtz, A.D., Ned, A.A., Goodman, S., Epstein, A.H., "Latest Ruggedized High Temperature Piezoresistive Transducers", NASA 2003 Propulsion Measurement Sensor Development Workshop, Huntsville, Alabama, May 13-15, 2003.
7. Kurtz, A.D., Goodman, S., Gardner, R., US Patent #6,363,792B1, "Ultra High Temperature Transducer Structure " issued in 2002 to Kulite Semiconductor Products, Inc. Leonia, NJ.