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Volumn 44, Issue , 1998, Pages 120-129

High temperature, silicon on insulated silicon pressure sensors with improved performance through Diffusion Enhanced Fusion (DEF) bonding

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; HIGH TEMPERATURE OPERATIONS; PASSIVATION; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; THERMODYNAMIC STABILITY;

EID: 0031699211     PISSN: 02277576     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (7)

References (0)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.