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Volumn 44, Issue , 1998, Pages 120-129
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High temperature, silicon on insulated silicon pressure sensors with improved performance through Diffusion Enhanced Fusion (DEF) bonding
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Author keywords
[No Author keywords available]
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Indexed keywords
BONDING;
HIGH TEMPERATURE OPERATIONS;
PASSIVATION;
SILICON ON INSULATOR TECHNOLOGY;
SILICON WAFERS;
THERMODYNAMIC STABILITY;
DIFFUSION ENHANCED FUSION (DEF) BONDING;
PRESSURE SENSORS;
PRESSURE TRANSDUCERS;
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EID: 0031699211
PISSN: 02277576
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (0)
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