Ag dots array fabricated using laser interference technique for biosensing

Sensors and Actuators, B: Chemical

Volumn 134, Issue 2, 2008, Pages 940-944

  Li, Haiying ^a   Luo, Xiangang ^a   Du, Chunlei ^a   Chen, Xunan ^a   Fu, Yongqi ^a  

^a INSTITUTE OF OPTICS AND ELECTRONICS   (China)

Author keywords

Biosensing; Etching; Laser interference lithography; LSPR

Indexed keywords

COST EFFECTIVENESS; ETCHING; EXTREME ULTRAVIOLET LITHOGRAPHY; LITHOGRAPHY; OPTICAL DESIGN; OXIDE MINERALS; PHOTORESISTORS; PHOTORESISTS; QUARTZ; SILVER; SURFACE PLASMON RESONANCE; SURFACE TREATMENT; THICK FILMS; TWO DIMENSIONAL;

ATOMIC FORCE MICROSCOPE; BIOSENSING; EXTINCTION SPECTRUM; GRATING STRUCTURES; GRID PATTERNS; INTERFERENCE LITHOGRAPHY; INTERFERENCE PATTERNS; LASER INTERFERENCE; LASER INTERFERENCE LITHOGRAPHY; LOCALIZED SURFACE-PLASMON RESONANCE; LSPR; NANOSPHERE LITHOGRAPHY; ONE-DIMENSIONAL; PATTERN GENERATION; PATTERN TRANSFERRING; PHOTORESIST FILMS; PHOTORESIST PATTERNING; QUARTZ SUBSTRATES; WAVE LENGTH SHIFTING; WET-ETCHING;

REACTIVE ION ETCHING;

EID: 51849147827     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.06.039     Document Type: Article

References (15)

1. Zayats A.V., Smolyaninov I.I., and Maradudin A.A. Nano-optics of surface plasmon polaritons. Phys. Rep. 408 (2005) 131-314
2. Homola J., Yee S.S., and Gauglitz G. Surface plasmon resonance sensors: review. Sens. Actuat. B 54 (1999) 3-15
3. Matsubara K., Kawata S., and Minami S. Optical chemical sensor based on surface plasmon measurement. Appl. Opt. 27 (1988) 1160-1163
4. Kano H., and Kawata S. Surface-plasmon sensor for absorption-sensitivity enhancement. Appl. Opt. 33 (1994) 5166-5170
5. Homola J. Surface plasmon resonance sensors for detection of chemical and biological species. Chem. Rev. 108 (2008) 462
6. Malinsky M.D., Kelly K.L., Schatz G.C., and Van Duyne R.P. Chain length dependence and sensing capabilities of the localized surface plasmon resonance of silver nanoparticles chemically modified with alkanethiol self-assembled monolayers. J. Am. Chem. Soc. 123 7 (2001) 1471-1482
7. Haes A.J., and Van Duyne R.P. A nanoscale optical biosensor: sensitivity and selectivity of an approach based on the localized surface plasmon resonance spectroscopy of triangular silver nanoparticles. J. Am. Chem. Soc. 124 35 (2002) 10596-10604
8. Haes A.J., and Van Duyne R.P. Nanoscale optical biosensors based on localized surface plasmon resonance spectroscopy. Proc. Int. Soc. Opt. Eng. (SPIE) 5221 (2003) 47-58
9. Haes A.J., and Van Duyne R.P. Nanosensors enable portable detectors for environmental and medical applications. Laser Focus World 39 (2003) 153-156
10. Haes A.J., Zou S., Schatz G.C., and Van Duyne R.P. A nanoscale optical biosensor: the long range distance dependence of the localized surface plasmon resonance of noble metal nanoparticles. J. Phys. Chem. B 108 1 (2004) 109-116
11. Hulteen J.C., and Van Duyne R.P. Nanosphere lithography: a materials general fabrication process for periodic particle array surfaces. J. Vac. Sci. Technol. A 13 (1995) 1553-1558
12. Zhu S., Luo X., Du C., Li F., Yin S., Deng Q., and Fu Y. Hybrid metallic nanoparticles for excitation of surface plasmon resonance. J. Appl. Phys. 101 (2007) 064701
13. Zhu S.-L., Luo X.-G., and Du C.-L. Discrete dipole approximation aided design method for nanostructure arrays. Chin. Phys. Lett. 24 10 (2007) 2902-2905
14. van Rijn C.J.M. Laser interference as a lithographic nanopatterning tool. J. Microlith. Microfab. Microsyst. 5 1 (2006) 0110121-0110126
15. Jensen T.R., Duval M.L., Kelly K.L., Lazarides A.A., Schatz G.C., and Van Duyne R.P. Nanosphere lithography: effect of the external dielectric medium on the surface plasmon resonance spectrum of a periodic array of silver nanoparticles. J. Phys. Chem. B 103 (1999) 9846