Piezoresistive geometry for maximizing microcantilever array sensitivity

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 2008, Pages 208-211

  Fletcher, Patrick C ^a   Xu, Y ^a   Gopinath, P ^b   Williams, J ^a   Alphenaar, B W ^b   Bradshaw, R D ^a   Keynton, R S ^b  

^a UNIVERSITY OF LOUISVILLE   (United States)

^b University of Louisville   (United States)

Author keywords

Array; Cantilever; Microcantilever; Optimization; Piezoresistor

Indexed keywords

ARRAY; BEAM LENGTH; CANTILEVER; COMPUTATIONAL STUDIES; DEVICE SENSITIVITY; GAS COMPOSITIONS; INITIAL TESTING; MICRO-CANTILEVERS; MICROCANTILEVER; OPTIMIZATION; PIEZO RESISTORS; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTIVE; PIEZORESISTOR; SYMMETRIC DESIGN; T-SHAPED; VISCOUS DAMPING;

COMPOSITE MICROMECHANICS;

CHEMICAL SENSORS;

EID: 51849136500     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/UGIM.2008.61     Document Type: Conference Paper

References (7)

1. Y. Xu, J. T. Lin, B. W. Alphenaar, and R. S. Keynton. "Viscous damping of microresonators for gas composition analysis." Applied Physics Letters 88 (April 2006): 143513.
2. R. D. Bradshaw, P. C. Fletcher, Y. Xu, B. W. Alphenaar, and R. S. Keynton. (2007). Model Optimization of a Piezoresistive Microactuation-Based Sensor For Gas Composition Analysis. ASME McMat. Austin, TX.
3. A. D. Salzberg, M. B. Bloom, N. J. Mourlas, and T. M. Krummel. "Microelectrical mechanical systems in surgery and medicine." Journal of the American College of Surgeons 194, no. 4 (April 2002): 463476.
4. C. Ziegler. "Cantilever-based biosensors." Anal Bioanal Chem 379 (2004): 946-959.
5. N. V. Lavrik, M. J. Sepaniak, and P. G. Datskos. "Cantilever transducers as a platform for chemical and biological sensors." Review of Scientific Instruments 75, no. 7 (July 2004): 2229-2253.
6. M. Su, S. Li, and V. Dravid. "Microcantilever resonance-based DNA detection with nanoparticle probes." Applied Physics Letters 82, no. 20 (May 2003): 3562-2564.
7. Y. Xu. "Fabrication, Development, and Characterization of Actuation Based Sensors and Applications for Gas Analysis." Doctorate of Philosophy Dissertation. University of Louisville, 2006.