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Volumn 14, Issue 12, 2008, Pages 1949-1954

Hard and soft magnetic materials for electromagnetic microactuators

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COBALT; ELECTROMAGNETISM; MAGNETIC DEVICES; MAGNETIC MATERIALS; MAGNETIC THIN FILMS; MAGNETRON SPUTTERING; MATERIALS PROPERTIES; MICROACTUATORS; OPTICAL DESIGN; RESEARCH; SAMARIUM; SPUTTER DEPOSITION; THICK FILMS; TRANSITION METALS;

EID: 51849098211     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0626-z     Document Type: Article
Times cited : (6)

References (13)
  • 3
    • 33646725271 scopus 로고    scopus 로고
    • Electroplated CoFe thin films for electromagnetic microactuators
    • Bedenbecker M, Gatzen HH (2006) Electroplated CoFe thin films for electromagnetic microactuators. J Appl Phys 99:08M308
    • (2006) J Appl Phys , vol.99
    • Bedenbecker, M.1    Gatzen, H.H.2
  • 4
    • 33646799844 scopus 로고    scopus 로고
    • Thin film SmCo magnets for use in electromagnetic microactuators
    • Budde T, Gatzen HH (2006) Thin film SmCo magnets for use in electromagnetic microactuators. J Appl Phys 99:08N304
    • (2006) J Appl Phys , vol.99
    • Budde, T.1    Gatzen, H.H.2
  • 6
    • 51849149860 scopus 로고    scopus 로고
    • Herstellung polymergebundener Hartmagnete durch in SU 8 eingebrachte Magnetpulver
    • Freiburg
    • Gatzen HH, Bedenbecker M (2005) Herstellung polymergebundener Hartmagnete durch in SU 8 eingebrachte Magnetpulver. Mikrosystemtechnik, Begleitband zum Kongress 2005, Freiburg, pp. 581-584
    • (2005) Mikrosystemtechnik, Begleitband Zum Kongress 2005 , pp. 581-584
    • Gatzen, H.H.1    Bedenbecker, M.2
  • 10
    • 0027684615 scopus 로고
    • High rate deposition of alumina films by reactive gas flow sputtering
    • Jung T, Westphal A (1993) High rate deposition of alumina films by reactive gas flow sputtering. Surf Coat Technol 59:S171
    • (1993) Surf Coat Technol , vol.59 , pp. 171
    • Jung, T.1    Westphal, A.2
  • 12
    • 33750603616 scopus 로고    scopus 로고
    • Magnetic levitation assisted guide for a linear microactuator
    • 11
    • Ruffert C, Gehrking R, Ponick B, Gatzen HH (2006) Magnetic levitation assisted guide for a linear microactuator. IEEE Trans Magn 42(11):3785-3787
    • (2006) IEEE Trans Magn , vol.42 , pp. 3785-3787
    • Ruffert, C.1    Gehrking, R.2    Ponick, B.3    Gatzen, H.H.4
  • 13
    • 33745487559 scopus 로고    scopus 로고
    • Mechanism of saccharin transformation to metal sulfides and effect of inclusions on corrosion susceptibility of electroplated CoFe magnetic films
    • 8
    • Tabakovic I, Riemer S, Tabakovic K, Sun M, Kief M (2006) Mechanism of saccharin transformation to metal sulfides and effect of inclusions on corrosion susceptibility of electroplated CoFe magnetic films. J Electrochem Soc 153(8):C586-C593
    • (2006) J Electrochem Soc , vol.153
    • Tabakovic, I.1    Riemer, S.2    Tabakovic, K.3    Sun, M.4    Kief, M.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.