Hard and soft magnetic materials for electromagnetic microactuators

Microsystem Technologies

Volumn 14, Issue 12, 2008, Pages 1949-1954

  Bedenbecker, M ^a   Bandorf, R ^b   Brauer G ^b   Luthje H ^b   Gatzen, H H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COBALT; ELECTROMAGNETISM; MAGNETIC DEVICES; MAGNETIC MATERIALS; MAGNETIC THIN FILMS; MAGNETRON SPUTTERING; MATERIALS PROPERTIES; MICROACTUATORS; OPTICAL DESIGN; RESEARCH; SAMARIUM; SPUTTER DEPOSITION; THICK FILMS; TRANSITION METALS;

COLLABORATIVE RESEARCH; ELECTROMAGNETIC MICROACTUATORS; FABRICATION PROCESSES; GERMANY; HARD MAGNETIC MATERIALS; PATTERNING PROCESSES; THIN FILMS;

SOFT MAGNETIC MATERIALS;

EID: 51849098211     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0626-z     Document Type: Article

References (13)

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