Determination of the electron energy distribution function via optical emission spectroscopy and a Langmuir probe in an ICP

Plasma Sources Science and Technology

Volumn 17, Issue 3, 2008, Pages

  Bibinov, N ^a   Halfmann, H ^a   Awakowicz, P ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRIC POWER DISTRIBUTION; ELECTRON ENERGY LEVELS; ELECTRONS; EMISSION SPECTROSCOPY; HELIUM; INDUCTIVELY COUPLED PLASMA; ION BEAMS; LANGMUIR PROBES; LIGHT EMISSION; MAGNETRONS; MEDICAL APPLICATIONS; MOLECULAR SPECTROSCOPY; OPTICAL EMISSION SPECTROSCOPY; PHOTORESISTS; SPECTRUM ANALYSIS;

APPLICATIONS.; ELECTRON DENSITIES; ELECTRON ENERGY DISTRIBUTION FUNCTION; INDUCTIVELY COUPLED PLASMA (ICP); LANGMUIR; LANGMUIR PROBE MEASUREMENTS; OPTICAL EMISSION SPECTROSCOPY (OES);

INTEGRATED OPTOELECTRONICS;

EID: 51849089560     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/3/035004     Document Type: Article

References (24)

1. 2/He dc glow discharges by optical spectroscopy and probes Plasma Sources Sci. Technol. 7 298-309
2. 2/He mixtures Plasma Sources Sci. Technol. 14 109-28
3. Halfmann H, Bibinov N, Wunderlich J and Awakowicz P 2007 A double inductively coupled plasma for sterilization of medical devices J. Phys. D: Appl. Phys. 40 4145-4154
4. Scheubert P, Fantz U, Awakowicz P and Paulin H 2001 Experimental and theoretical characterization of an inductively coupled plasma source J. Appl. Phys. 90 587-598
5. Langmuir I and Mott-Smith H 1924 Studies of electric discharges in gases at low pressure Gen. Electr. Rev. 27 449-55
6. Langmuir I and Mott-Smith H 1926 The theory of collectors in gaseous discharges Phys. Rev. 28 727-63
7. Tonks L and Langmuir I 1929 A general theory of the plasma of an arc Phys. Rev. 34 876-922
8. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Material Processing (New York: Wiley)
9. Schulze M 2007 Diagnostik von niederdruckplasmen zur kontroillierten synthese von kohlenstoff-nanoteilchen PhD Thesis Ruhr-Universität Bochum, Institute for Electrical Engineering and Plasma Technology
10. Druyvesteyn M 1930 Der niedervoltbogen Z. Phys. 64 781-98
11. Bibinov N K, Bolshukhin D O, Kokh D B, Pravilov A M, Vinogradov I P and Wiesemann K 1997 Absolute calibration of the efficiency of a vuv-monochromator/detector system in the range 110 nm-450 nm Meas. Sci. Technol. 8 773-81
12. Bibinov N, Halfmann H, Awakowicz P and Wiesemann K 2007 Relative and absolute intensity calibrations of a modern broadband echelle spectrometer Meas. Sci. Technol. 18 1327-37
13. g, v = 0-2) J. Chem. Phys. 91 701-7
14. Itikawa Y 2006 Cross sections for elelctron collisions with nitrogen molecules J Phys. Chem. Ref. Data 35 31-53
15. Marrero T R and Mason E A 1972 Gaseous diffusion coefficients J. Phys. Chem. Ref. Data 1 3-118
16. Capitelli M, Cacciatore M and Billing G D 1986 Nonequilibrium Vibrational Kinetics (Berlin: Springer)
17. Lofthus A and Krupenie P H 1977 The spectrum of molecular nitrogen J. Phys. Chem. Ref. Data 6 113-306
18. Pouvesle J M, Bouchoule A and Stevefelt J 1982 Modeling of the charge transfer afterglow excited by intense electrical discharges in high pressure helium nitrogen mixtures J. Chem. Phys. 77 817-25
19. 2 J. Electron Spectrosc. Relat. Phenom. 16 213
20. Dasgupta A, Blaha M and Giuliani J L 1999 Electron-impact excitation from the ground and the metastable levels of Ar: I Phys. Rev. A 61 012703
21. Ivanov V A and Makasyuk V 1990 Destruction of ar 4s (3p2) metastable atoms by slow elelctrons Opt. Spectrosc. 69 308-11
22. Hyman H A 1979 Electron-impact ionization cross sections for excited states of the rare gases (Ne, Ar, Kr, Xe), cadmium and mercury Phys. Rev. A 20 855-9
23. Zhiglinski A G 1994 Handbook of Rate Constants of Processes of Atoms, Ions, Elelctrons and Photons (St Petersburg: St Petersburg Univerity Press) (in Russian)
24. Okabe H 1978 Photochemistry of Small Molecules (New York: Wiley)