Irreversible optical properties of AgOx mask layer with temperature for super-resolution near-field structure application investigated by in situ, ex situ ellipsometry

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 7 B, 2004, Pages 5014-5017

  Xuezhe, L I ^a   Kim, Sang Jun ^a   An, Sung Hyuck ^a   Kim, Sang Youl ^a  

^a Ajou University   (South Korea)

Author keywords

Complex refractive index; ex situ ellipsometry; in situ eilipsometry; Irreversible optical properties; Silver oxide; Super RENS

Indexed keywords

ELLIPSOMETRY; MASKS; OPTICAL SYSTEMS; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THIN FILMS;

COMPLEX REFRACTIVE INDEX; EX SITU ELLIPSOMETRY; IN SITU ELLIPSOMETRY; IRREVERSIBLE OPTICAL PROPERTIES; SILVER OXIDE; SUPER-RENS;

SILVER COMPOUNDS;

EID: 5144220691     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.5014     Document Type: Conference Paper

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