An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixed-technology control loops

2007 IEEE International Behavioral Modeling and Simulation Workshop, BMAS

Volumn , Issue , 2007, Pages 143-147

  Zhao, Chenxu ^a   Wang, Leran ^a   Kazmierski, Tom J ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; COMPOSITE MICROMECHANICS; COMPUTER NETWORKS; MEMS; REMOTE CONTROL;

CONTROL LOOPS; MEMS ACCELEROMETERS;

DYNAMICS;

EID: 51349143232     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/BMAS.2007.4437541     Document Type: Conference Paper

References (5)

1. D.A. Teegarden, P.J. Ashendenm, and G.D. Peterson. The system designers guide to VHDL-AMS analogue, mixed-signal, and mixed-technology modelling. Morgan Kaufmann Publishers Inc, US, 10 Sep 2002.
2. Y. Dong, M. Kraft, C. Gollasch, and W. Redman-White. A high-performance accelerometer with a fifth-order sigma-delta modulator. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 15:S22-S29, 2005.
3. D. C. Hamill. Lumped equivalent circuits of magnetic components: The gyrator-capacitor approach. IEEE Trans. Power Electron, 8(2):97-103, Apr 1993.
4. M. Kraft, C. Lewis, T. Hesketh, and S. Szymkowiak. A novel micromachined accelerometer capacitive interface. Sensors & Actuators, A68/1-3:466-473, 1998.
5. J. Seeger, X. Jiang, M. Kraft, and B. Boser. Sense finger dynamics in a ∑△ force-feedback gyroscope. Tech. Digest of Solid State Sensor and Actuator Workshop, pages 296-299, Jun 2000.