Design and simulation of MEMS silicon micro-cantilever resonant sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6423, Issue , 2007, Pages

  Qiu, Chengjun ^a,b   Bu, Dan ^a   Qu, Wei ^a   Cao, Maosheng ^b  

^a HEILONGJIANG UNIVERSITY   (China)

^b BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

MEMS; Micro cantilever; Resonant sensor; Simulation

Indexed keywords

COMPOSITE MICROMECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; PROCESS ENGINEERING; SENSOR NETWORKS; SENSORS; SILICON;

DESIGN AND SIMULATION; DYNAMIC CHARACTERISTICS; EXPERIMENT RESEARCH; FABRICATION TECHNOLOGIES; INHERENT FREQUENCIES; INTERNATIONAL CONFERENCES; MEMS SENSORS; MEMS TECHNOLOGY; MICRO CANTILEVERS; MICRO-CANTILEVER; RESONANT SENSOR; RESONANT SENSORS; SIMULATION; SMART MATERIALS;

PHOTORESISTS;

EID: 51249087771     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.780093     Document Type: Conference Paper

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