Excitation of acoustic waves at the interface between lithium niobate and silicon plates

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2007, Pages 733-736

  Gachon, Dorian ^a   Majjad, Hicham ^a   Daniau, William ^a   Laude, Vincent ^a   Ballandras, Sylvain ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EUROPEAN; FREQUENCY CONTROLS; LITHIUM NIOBATE;

ACOUSTICS; ELECTROMAGNETIC WAVE PROPAGATION; NIOBIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SILICON;

SILICON WAFERS;

EID: 51049107020     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2007.4319172     Document Type: Conference Paper

References (7)

1. R. Stoneley, "Elastic waves at the surface of separation of two solids," Proc. Roy. Soc., vol. A106, pp. 416-428, 1924.
2. Y. Shimizu and T. Irino, "Stoneley waves propagating along an interface between piezoelectric material and isotropic material," Proc. of the IEEE Ultrasonics Symp., pp. 373, 1983.
3. K. Yamanouchi, K. Iwahashi, and K. Shibayama, "Piezoelectric acoustic boundary waves propagating along the interface between SiO2 and LiTaO3," IEEE SU 25 (6) 384-389, 1978.
4. C. T. Pan, P. J. Cheng, M. F. Chen and C. K. Yen, "Intermediate wafer level bonding and interface behavior," Microelectronics Reliability, Volume 45, Issues 3-4, pp. 657-663, 2005.
5. T. Ohtsuchi, M. Sugimomto, T. Ogura, Y. Tomita, O. Kawasaki, K. Eda, "Shock sensors using direct bonding of LiNbO3 crystals," Proc. of the IEEE Ultrasonics Symp., pp. 331-334, 1996.
6. D. Gachon, G. Lengaigne, H. Majjad, S. Benchabane, S. Ballandras, V. Laude, "High frequency bulk acoustic wave resonator using thinned monocrystalline lithium niobate," Proc. of the 20th EFTF, 2006, Braunschweig (Germany)
7. S. Ballandras, V. Laude, A. Reinhardt, M. Wilm, R. Lardat, W. Steichen, T. Pastureaud, "Optimisation and Improved Convergence of Coupled Finite Element/Boundary Element Analyses", proc. of the IEEE Ultrasonics Symp., pp. 679-682, 2005