Analysis on measurement method of improved Fourier transforms profilometry

Guangxue Xuebao/Acta Optica Sinica

Volumn 28, Issue 7, 2008, Pages 1291-1295

  Mao, Xianfu ^a   Su, Xianyu ^a   Chen, Wenjing ^a   Jin, Hailong ^a  

^a SICHUAN UNIVERSITY   (China)

Author keywords

Fourier transform profilometry (FTP); Improved Fourier transform profilometry (IFTP); Optical measurement; Phase height mapping

Indexed keywords

BOOLEAN FUNCTIONS; COMPUTER NETWORKS; LENSES; MATHEMATICAL TRANSFORMATIONS; MERGERS AND ACQUISITIONS; OPTICAL INSTRUMENTS;

FOURIER TRANSFORM PROFILOMETRY (FTP); FOURIER-TRANSFORM PROFILOMETRY; IMPROVED FOURIER TRANSFORM PROFILOMETRY (IFTP); OPTICAL MEASUREMENT; PHASE-HEIGHT MAPPING;

FOURIER TRANSFORMS;

EID: 50549097836     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: 10.3788/AOS20082807.1291     Document Type: Article

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