Structural study of amorphous vanadium oxide films for thin film microbattery

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 2, 2003, Pages 754-759

  Kim, Han Ki ^a,b   Seong, Tae Yeon ^a   Yoon, Young Soo ^b  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DEGRADATION; ELECTRIC BATTERIES; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTROCHEMISTRY; MAGNETRON SPUTTERING; THIN FILM DEVICES; TRANSMISSION ELECTRON MICROSCOPY; VANADIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

THIN FILM BATTERIES (TFB);

AMORPHOUS FILMS;

EID: 0037274077     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1547746     Document Type: Article

References (16)

1. J. B. Bates, G. R. Gruzalski, N. Dudney, C. F. Luck, and X.-H. Yu, Solid State Technol. 7, 59 (1993).
2. E. J. Jeon, Y. W. Shin, S. C. Nam, Y. S. Yoon, and W. I. Cho, J. Korea Vac. Soc. 9, 42 (2000).
3. S.-H. Lee, P. Liu, C. E. Tracy, and D. K. Benson, Electrochem. Solid-State Lett. 2, 425 (1999).
4. F. K. Shokoohi, J. M. Tarascon, and B. J. Wilkens, Appl. Phys. Lett. 59, 1260 (1991).
5. B. J. Neudecker, N. J. Dudney, and J. B. Bates, J. Electrochem. Soc. 147, 517 (2000).
6. H.-K. Kim, E. J. Joen, Y.-W. Ok, T.-Y. Seong, W. I. Cho, and Y. S. Yoon, J. Korea Inst. Elec. Electron. Mater. Eng. 13, 751 (2000).
7. H.-K. Kim, E. J. Jeon, Y.-W. Ok, T.-Y. Seong, W. I. Cho, and Y. S. Yoon, J. Vac. Sci. Technol, A 19, 2549 (2001).
8. E. J. Jeon, Y. W. Shin, S. C. Nam, W. I. Cho, and Y. S. Yoon, J. Electrochem. Soc. 148, A318 (2001).
9. J. B. Bates, N. J. Dudney, D. C. Lubben, G. R. Grazalski, B. S. Kwak, X. Yu, and R. A. Zuhr, J. Power Sources 54, 58 (1995).
10. C. Tsang and A. Manthiram, J. Electrochem. Soc. 144, 520 (1997).
11. J.-G. Zhang, J. M. McGraw, J. Turner, and D. Ginley, J. Electrochem. Soc. 144, 1630 (1997).
12. K. West, B. Zachau-Christiansen, and T. Jacobsen, J. Power Sources 43-44, 127 (1993).
13. The XRD examination was also made of the sample after 25 cycles when most of the capacity fade occurs. The result showed evidence that crystallites are formed at the initial stage of cycle.
14. B. Wang, B. C. Chakoumakos, B. C. Sales, B. S. Kwak, and J. B. Bates, J. Solid State Chem. 115, 313 (1995).
15. N. J. Dudney, J. B. Bates, R. A. Zuhr, S. Young, J. D. Robertson, H. P. Jun, and S. A. Hackney, J, Electrochem. Soc. 146, 2455 (1999).
16. Y. Sakurai, S. Okada, J. Yamaki, and J. Yamaki, J. Power Sources 20, 173 (1987).