Generation of microplasma jet at atmospheric pressure using a modified waveguide-based plasma torch

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5275-5279

  Kanazawa, S ^a   Daidai, R ^a   Akamine, S ^a   Ohkubo, T ^a  

^a OITA UNIVERSITY   (Japan)

Author keywords

Atmospheric pressure; Filamentation; Microplasma jet; Microwave discharge

Indexed keywords

ARGON; ATMOSPHERIC PRESSURE; ATMOSPHERICS; CLIMATOLOGY; HELIUM; INERT GASES; JETS; LAW ENFORCEMENT; METEOROLOGY; MICROWAVES; NEEDLES; NUCLEAR PHYSICS; PLASMA ACCELERATORS; PLASMA DEVICES; PLASMA DISPLAY DEVICES; PLASMA JETS; PLASMA TORCHES; PLASMAS; PRESSURE; RADIOACTIVITY; THERMOELECTRICITY; WAVEGUIDES;

CIRCULAR HOLES; FILAMENTATION; FINE STRUCTURES; FREE SPACES; HELIUM GAS; MICROPLASMA JET; MICROWAVE DISCHARGE; MICROWAVE DISCHARGES; PLASMA STRUCTURES; REDUCED HEIGHT; SMALL SIZE;

ELECTRIC DISCHARGES;

EID: 50349091412     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.005     Document Type: Article

References (15)

1. Tachibana K. Oyo Buturi 75 (1994) 399
2. Yoshiki H., Taniguchi K., and Horiike Y. Jpn. J. Appl. Phys. 41 (2002) 5797
3. Shimizu Y., Sasaki T., Bose A.C., Terashima K., and Koshizaki N. Surf. Coat. Technol. 200 (1993) 4251
4. Sakurai Y., Kobayashi T., Hasegawa Y., and Shirai H. Jpn. J. Appl. Phys. 44 (2005) L749
5. Yang Z., Shirai H., Kobayashi T., and Hasegawa Y. Thin Solid Films, 515 (2007) 4153
6. Ito T., and Terashima K. Appl. Phys. Lett. 80 (2002) 2648
7. Tan H.M.L., Fukuda H., Akagi T., and Ichiki T. Thin Solid Films, 515 (2007) 5172
8. Moisan M., Sauvet G., Zakrzewski Z., and Hubert J. Plasma Source Sci. Technol. 3 (1994) 584
9. Okamoto Y. Jpn. J. Appl. Phys. 38 (1999) L338
10. Takao Y., Ono K., Takahashi K., and Eriguchi K. Jpn. J. Appl. Phys. 45 (2006) 8235
11. Jasinski M., Goch M., Zakrzewski Z., and Mizeraczyk J. Trans. Inst. Fluid-Flow Machinery 119 (2007) 29
12. Moisan M., Zakrzewski Z., and Rostaing J.C. Plasma Source Sci. Technol. 10 (2001) 387
13. van der Mullen J.J.A.M., van de Sande M.J., De Vries N., Broks B., Iordanova E., Gamero A., Torres J., and Sola A. Spetrochim. Acta Part B 62 (2007) 1135
14. Kabouzi Y., Calzada M.D., Moisan M., Tran K.C., and Trassy C. J. Appl.Phys. 91 (2002) 1008
15. Kudela J., Odrobina I., and Kando M. Jpn. J. Appl. Phys. 37 (1998) 4169