Bulk and interface band diagrams of advanced intermetal dielectrics

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 977-980

  Guedj, C ^a   Martinez, E ^a   Licitra, C ^a   Imbert, G ^b   Barnes, J P ^a   Lafond, D ^a   Toffoli, A ^a   Arnal, V ^b   Anaud, L ^a  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DEVICES; GRAPHIC METHODS; TANTALUM; TANTALUM COMPOUNDS;

BAND DIAGRAMS; ETCH-STOP LAYERS; INTER-METAL-DIELECTRICS;

DIELECTRIC MATERIALS;

EID: 50249178567     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4419117     Document Type: Conference Paper

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