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Volumn 36, Issue 4 PART 1, 2008, Pages 884-885

Transport and deposition of plasma-sputtered platinum atoms: Comparison between experiments and simulation

Author keywords

Argon; Atomic layer deposition; Deposition; Monte Carlo; Plasma sputtering; Plasmas; Platinum; Silicon; Sputtering; Substrates

Indexed keywords

ARGON; ATOMIC PHYSICS; DEPOSITION RATES; ELECTRIC POWER DISTRIBUTION; INERT GASES; MONTE CARLO METHODS; PLASMA DEPOSITION; PLASMAS; PLATINUM; SPUTTER DEPOSITION; SPUTTERING; THREE DIMENSIONAL; WALLS (STRUCTURAL PARTITIONS);

EID: 50249160171     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.924421     Document Type: Article
Times cited : (2)

References (6)
  • 1
    • 34249905844 scopus 로고    scopus 로고
    • Plasma based platinum nanoaggregates deposited on carbon nanofibers improve fuel cell efficiency
    • Jun
    • A. Caillard, C. Charles, R. Boswell, P. Brault, and C. Coutanceau, "Plasma based platinum nanoaggregates deposited on carbon nanofibers improve fuel cell efficiency," Appl. Phys. Lett., vol. 90, no. 22, p. 223 119, Jun. 2007
    • (2007) Appl. Phys. Lett , vol.90 , Issue.22 , pp. 223-119
    • Caillard, A.1    Charles, C.2    Boswell, R.3    Brault, P.4    Coutanceau, C.5
  • 2
    • 34249864408 scopus 로고    scopus 로고
    • Propagating double layers in electronegative plasmas
    • Mar
    • A. Meige and N. Plihon, "Propagating double layers in electronegative plasmas," Phys. Plas., vol. 14, p. 053 508, Mar. 2007.
    • (2007) Phys. Plas , vol.14 , pp. 053-508
    • Meige, A.1    Plihon, N.2
  • 3
    • 0019532488 scopus 로고
    • Application of an extended linear cascade model to the sputtering of Ag, Au and Pt by heavy atomic and molecular ions
    • Feb
    • D. A. Thompson, "Application of an extended linear cascade model to the sputtering of Ag, Au and Pt by heavy atomic and molecular ions," J. Appl. Phys., vol. 52, no. 2, pp. 982-989, Feb. 1981.
    • (1981) J. Appl. Phys , vol.52 , Issue.2 , pp. 982-989
    • Thompson, D.A.1
  • 4
    • 0030096316 scopus 로고    scopus 로고
    • Energy dependence of ion-induced sputtering yields from monatomic solids at normal incidence
    • Mar
    • Y. Yamamura and H. Tawara, "Energy dependence of ion-induced sputtering yields from monatomic solids at normal incidence," At. Data Nucl. Data Tables, vol. 62, no. 2, pp. 149-253, Mar. 1996.
    • (1996) At. Data Nucl. Data Tables , vol.62 , Issue.2 , pp. 149-253
    • Yamamura, Y.1    Tawara, H.2
  • 5
    • 50249189123 scopus 로고    scopus 로고
    • A. Caillard, Elaboration d'électrodes de piles à combustible par plasma, Ph.D. dissertation, Australian Nat. Univ. Canberra, Australia and Université d'Orléans, Orléans, France, 2006.
    • A. Caillard, "Elaboration d'électrodes de piles à combustible par plasma," Ph.D. dissertation, Australian Nat. Univ. Canberra, Australia and Université d'Orléans, Orléans, France, 2006.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.