Interaction of oxygen plasma with aluminium substrates

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 1, 2008, Pages 868-869

  Mozetič, Miran ^a   Cvelbar, Uroš ^a   Vesel, Alenka ^a   Krstulović, Nikša ^b   Milošević, Slobodan ^b  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b INSTITUTE OF PHYSICS   (Croatia)

Author keywords

Aluminium; Aluminum; Electron tubes; Molecules formation; Plasma temperature; Plasmas; Radio frequency oxygen plasma; Spectroscopy; Substrates; Temperature; Wires

Indexed keywords

ALUMINUM; ALUMINUM CLADDING; ALUMINUM FOIL; ATOMIC SPECTROSCOPY; EMISSION SPECTROSCOPY; FIBER OPTICS; FLOW INTERACTIONS; IMAGE ENHANCEMENT; LIGHT METALS; MATERIALS HANDLING; MOLECULAR SPECTROSCOPY; NONMETALS; OPTICAL EMISSION SPECTROSCOPY; OXYGEN; PROCESS ENGINEERING; PROCESS MONITORING;

ALUMINIUM; ELECTRON TUBES; FIBER SPECTROMETER; MATERIAL PROCESSING; MOLECULES FORMATION; OXYGEN PLASMAS; PLASMA CHARACTERIZATION; PLASMA SCIENCE; PLASMA TEMPERATURE; RADIO FREQUENCY OXYGEN PLASMA; SPECTROSCOPY; SUBSTRATES; TEMPERATURE; WIRES;

PLASMAS;

EID: 50249110258     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.925383     Document Type: Article

References (4)

1. A. Vesel, M. Mozetič, A. Drenik, S. Milošević, N. Krstulović, M. Balat-Pichelin, I. Poberaj, and D. Babić, "Cleaning of porous aluminium titanate by oxygen plasma," Plasma Chem. Plasma Process., vol. 26, no. 6, pp. 577-584, Dec. 2006.
2. D. Vujošević, M. Mozetič, U. Cvelbar, N. Krstulović, and S. Milošević, "Optical emission spectroscopy characterization of oxygen plasma during degradation of Escherichia Coli," J. Appl. Phys., vol. 101, no. 10, p. 1 033 051-7, 2007.
3. A. Vesel, M. Mozetič, A. Hladnik, J. Dolenc, J. Zule, S. Milošević, N. Krstulović, M. Klanjšek-Gunde, and N. Hauptmann, "Modification of ink-jet paper by oxygen-plasma treatment," J. Phys. D, Appl. Phys., vol. 40, no. 12, pp. 3689-3696, Jun. 2007.
4. I. G. Dors, C. Parigger, and J. W. L. Lewis, "Spectroscopic temperature determination of aluminium monoxide in laser ablation with 266-nm radiation," Opt. Lett., vol. 23, no. 22, pp. 1778-1780, Nov. 1998.