A compact high-sensitivity heterodyne interferometer for industrial metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7003, Issue , 2008, Pages

  Schuldt, Thilo ^a,b   Gohlke, Martin ^b,c   Weise, Dennis ^c   Peters, Achim ^b   Johann, Ulrich ^c   Braxmaier, Claus ^a,c  

^a UNIVERSITY OF APPLIED SCIENCES   (Germany)

^b HUMBOLDT UNIVERSITY   (Germany)

^c AIRBUS GROUP INNOVATIONS   (Germany)

Author keywords

Differential wavefront sensing; Heterodyne interferometer; Interferometry; Laser metrology; LISA; Nano positioning control; Position sensing; Profilometry

Indexed keywords

FIBER OPTICS; HETERODYNING; INTERFEROMETERS; INTERFEROMETRY; OPTICAL INSTRUMENTS; POLARIZATION; POWDERS; SENSORS; TRANSLATION (LANGUAGES);

DIFFERENTIAL WAVEFRONT SENSING; HETERODYNE INTERFEROMETER; HETERODYNE INTERFEROMETERS; HIGH SENSITIVITIES; INDUSTRIAL METROLOGY; LASER METROLOGY; LISA; NANO-POSITIONING CONTROL; NOISE LEVELS; OPTICAL PATHLENGTHS; POSITION SENSING; PROFILOMETRY; REFERENCE BEAMS; SYMMETRIC DESIGN; TILT MEASUREMENTS; WAVE-FRONT SENSING;

OPTICAL SENSORS;

EID: 50249091508     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.781336     Document Type: Conference Paper

References (10)

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