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Volumn 1, Issue 2, 2007, Pages 168-179

Compact laser interferometer for translation and tilt metrology

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Indexed keywords

EID: 85009552802 PISSN: 15599612 EISSN: 15599620 Source Type: Journal
DOI: 10.1080/15599610701385537 Document Type: Article

Times cited : (19)

References (9)

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- Experimental demonstration of an automatic alignment system for optical interferometers
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- Detection of optical radiation
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- Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels
- Tanaka, Mitsuru, Tohru Yamagami, and Kan Nakayama. 1989. Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels. IEEE Trans. Instrum. Meas. 38(2):552-554.
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- Heterodyne interferometer with two spatial-separated polarization beams for nanometrology
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