|
Volumn , Issue , 2002, Pages 279-282
|
Simulation based design of O2 MEMS sensor
|
Author keywords
BEM; Integral Methods; Magnctostatic; MBIT; Sensors
|
Indexed keywords
APPROXIMATION THEORY;
BOUNDARY ELEMENT METHOD;
COMPUTER AIDED DESIGN;
COMPUTER SIMULATION;
HARMONIC ANALYSIS;
INTEGRATION;
MAGNETOELECTRIC EFFECTS;
OXYGEN SENSORS;
PARAMAGNETISM;
VECTORS;
BEM;
INTEGRAL METHODS;
MAGNETOSTATIC;
MULTIPOLE BASED INTEGRAL TECHNOLOGY (MBIT);
MICROELECTROMECHANICAL DEVICES;
|
EID: 6344289555
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
|
References (4)
|