A multistage in-plane micro-thermoelectric cooler

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 840-843

  Gross, Andrew ^a   Huang, Baoling ^a   Hwang, Gi Suk ^a   Lawrence, Chris ^a   Ghafouri, Niloufar ^a   Sang, Woo Lee ^a   Kim, Hanseup ^a   Uher, Citrad ^a   Kaviany, Massoud ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY TELLURIDE; APPLICATIONS.; BISMUTH TELLURIDES; CO-EVAPORATED; IN-PLANE; INTERNATIONAL CONFERENCES; LOW TEMPERATURES; MECHANICAL ROBUSTNESS; MEMS DEVICES; MEMS RESONATORS; MICRO-COOLER; MICRO-ELECTRO MECHANICAL SYSTEMS; MULTI-LAYER PROCESSING; PHASE-NOISE; THERMOELECTRIC MATERIALS;

AMORPHOUS MATERIALS; ANTIMONY; BISMUTH; COBALT; COBALT COMPOUNDS; COMPOSITE MICROMECHANICS; COOLING SYSTEMS; FILM PREPARATION; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; OPTICAL DESIGN; REACTIVE ION ETCHING; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY; THICK FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 50149117563     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443787     Document Type: Conference Paper

References (6)

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6. Hwang, G.S., Gross, A.J., Huang, B.L., Qafouri, N., Kim, H.S., Lee, S.W., Lawrence, C., Uher, C., Najafi, K., Kaviany, M.., "Micro Thermoelectric Cooler: Concentric, Planar Multistage," Int. J. Heat and Mass Transfer, submitted.