Fabrication of a micro cryogenic cold stage using MEMS-technology

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 1919-1925

  Lerou, P P P M ^a   Venhorst, G C F ^a   Berends, C F ^b   Veenstra, T T ^a   Blom, M ^b   Burger, J F ^a   Ter Brake, H J M ^a   Rogalla, H ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b Micronit Microfluidics   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; OPTIMIZATION; THERMAL EFFECTS;

COOLING POWER; GLASS WAFERS; MICRO CRYOGENIC COOLERS;

COOLING SYSTEMS;

EID: 33748804474     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/002     Document Type: Article

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