Gas-sensing characterization of TiO2-ZnO based thin film

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 964-967

  Wisitsoraat, A ^a   Tuantranont, A ^a   Comini, E ^b   Sberveglieri, G ^b   Wlodarski, W ^c  

^a NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

^b UNIVERSITY OF BRESCIA   (Italy)

^c RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ZINC OXIDE;

GAS SENSING CHARACTERISTICS; GAS-SENSING;

SENSORS;

EID: 50149112463     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355784     Document Type: Conference Paper

References (13)

1. 3 and TiO:W layer for land fill produced gases sensing," Sens. Actuators B vol. 100, p. 41-46, 2004.
2. 3 sol-gel gas sensors," Sens. Actuators B vol. 83, p. 276-280, 2002.
3. I. Jimnez J. Arbiol, G. Dezanneau, A. Cornet and J. R. Morante "Crystalline structure, defects and gas sensor response to NO2 and H2S of tungsten trioxide nanopowders" Sensor and Actuator B93 (2003) 475-485.
4. 3 thin films as ozone gas sensor" Sensor and Actuator B84 (2002) 1-5.
5. 2 anatase thin film as gas sensors" Sensor and Actuator B26 (1995) 71-75.
6. 2 thin films" Thin solid film 310 (1997) 161-166.
7. E. Comini, G., Sberveglieri, and V. Guidi, "Ti-W-O sputtered thin film as n- or p-type gas sensors," Sens. Actuators B 70 (2000) 108-114.
8. H. Xu, X. Liu, D. Cui M. Li and M. Jiang, "A novel method for improving the performance of ZnO gas sensors," Sens. Actuator B 120 (2005) 123-127.
9. Y. Anno, T. Maekawa, J. Tamaki, Y. Asano and K. Hayashi, Zinc-oxide-based semiconductor sensors for detecting acetone and capronaldehyde in the vapor of consommé soup, Sens. Actuators B 24-25 (1995), pp. 623-627.
10. B. Rao, Zinc oxide ceramic semiconductor gas sensor for ethanol vapor, Mater. Chem. Phys. 64 (2000), pp. 62-65.
11. 2 thin film gas sensor" J. Appl. Phys. 53 (1981) 2785-2787.
12. H. Madhusudhana and N. Chanodrkar, "Response study of electronbeam evaporated thin-film tin oxide gas sensors" Sensor and Actuator B9 (1992) 1-8.
13. S. Shukla, S. Seal, L. Ludwig and C. Parish, "Nanocrystalline indium oxide-doped tin oxide thin film as low temperature hydrogen sensor", Sensors and Actuators B, Volume 97, 2004, pp. 256-265.