Tapered waveguide by liquid for a coupler of optical fibers to mems devices

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 794-797

  Terae, Hisashi ^a   Nguyen, Binh Khiem ^a   Takahata, Tomoyuki ^a   Iwase, Eiji ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; FABRICATION; FIBER OPTICS; LIQUIDS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVE GENERATION; OPTICAL DESIGN; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL MATERIALS; REACTIVE ION ETCHING; SILICONES; WAVEGUIDES;

INTERNATIONAL CONFERENCES; MEMS DEVICES; MICRO STRUCTURING; MICRO-ELECTRO MECHANICAL SYSTEMS; ONE CHIP; OPTICAL-; PARYLENE FILM; PROPAGATION LOSS; SILICONE OILS; SMOOTH SURFACES; TAPERED WAVEGUIDES;

FIBERS;

EID: 50149095598     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443776     Document Type: Conference Paper

References (5)

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