Performance characterization of miniaturized dielectric elastomer actuators fabricated using metal ion implantation

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 503-506

  Rosset, S ^a   Niklaus, M ^a   Dubois, P ^a   Shea, H R ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; GOLD; ION BOMBARDMENT; ION IMPLANTATION; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METAL IONS; METALS; MICROELECTROMECHANICAL DEVICES; NONMETALS; OPTICAL DESIGN; OPTICAL INSTRUMENTS; PHOTORESISTS; PLASTICS; POLYMERS; REACTIVE ION ETCHING; RUBBER; SILICON;

ACTIVE OPTICAL DEVICES; ANALYTICAL MODELLING; APPLIED PRESSURE; COMPLIANT ELECTRODES; DIELECTRIC ELASTOMER ACTUATORS; DISTRIBUTED LOADS; GOLD IONS; INTERNATIONAL CONFERENCES; MECHANICAL WORK; METAL-ION IMPLANTATION; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-PUMPS; OUT-OF-PLANE DEFLECTION; PERFORMANCE CHARACTERIZATION; PERFORMANCE DATA; POLY-DIMETHYL-SILOXANE MEMBRANE; POLYMER ACTUATORS; REPORT MEASUREMENTS; SILICON CHIPS; THROUGH HOLES; VERTICAL DISPLACEMENTS;

IONS;

EID: 50149094067     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443703     Document Type: Conference Paper

References (7)

1. S. Ashley, "Artificial Muscles", Scientific American, vol. 289, pp. 52-59, 2003.
2. S. Rosset, M. Niklaus, P. Dubois, M. Dadras, and H. Shea, "Mechanical properties of electroactive polymer microactuators with ion-implanted electrodes", in Proceedings of SPIE, vol. 6524, 2007.
3. P. Dubois, S. Rosset, S. Koster, J. Stauffer, S. Mikhailov, M. Dadras, N.-F. de Rooij, and H. Shea, "Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes", Sensors and Actuators A: Physical, vol. 130-131, pp. 147-154, 2006.
4. R. E. Pelrine, R. D. Kornbluh, and J. P. Joseph, "Electrostriction of polymer dielectrics with compliant electrodes as a means of actuation", Sensors and Actuators A: Physical, vol. 64, pp. 77-85, 1998.
5. S. Rosset, M. Niklaus, P.Dubois, and H. R. Shea, "Mechanical Characterization of a Dielectric Elastomer Microactuator With Ion-Implanted Electrodes", submitted to Sensors and Actuators A: Physical, 2007.
6. B. E. Alaca, J. C. Selby, M. T. A. Saif, and H. Sehitoglu, "Biaxial testing of nanoscale films on compliant substrates: Fatigue and fracture", Review of Scientific Instruments, vol. 73, pp. 2963-2970, 2002.
7. SRIM: SRIM - The Stopping and Range of Ions in Matter-software at: http://www.srim.org/