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Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 924-927

Miniaturization of on-wall in-tube flexible thermal flow sensor using heat shrinkable tube

(5) Naito, J a Shikida, M a Hirota, M a Tan, Z Y a Sato, K a

a NAGOYA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC BATTERIES; FUEL CELLS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MINIATURE INSTRUMENTS; OPTICAL DESIGN; REACTIVE ION ETCHING; SENSORS; WALLS (STRUCTURAL PARTITIONS);

ASYMMETRIC FLOWS; CHEMICAL ANALYZERS; ELECTRICAL RESISTANCES; EXTERNAL-; FABRICATION PROCESSES; FILM SENSOR; FLOW SENSORS; FLOW-RATE; HEAT SHRINKABLE; HEAT SHRINKING; INNER WALLS; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; OUTER DIAMETERS; PORTABLE FUEL CELLS; SENSING ELEMENTS; TEMPERATURE COEFFICIENT OF RESISTANCE;

TUBES (COMPONENTS);

EID: 50149091974 PISSN: 10846999 EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/MEMSYS.2008.4443808 Document Type: Conference Paper

Times cited : (8)

References (8)

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2
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3
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5
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7
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