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Volumn , Issue , 2008, Pages 363-366

Surface nanostructuring of biocompatible polymer for wettability control in MEMS

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC ELECTRICITY; COMPOSITE MICROMECHANICS; CONTACT ANGLE; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; FRICTION; GEOPHYSICAL PROSPECTING; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; METAL ANALYSIS; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; REACTIVE ION ETCHING; SODIUM; SURFACE PROPERTIES; SURFACE ROUGHNESS;

EID: 50149083492     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443668     Document Type: Conference Paper
Times cited : (7)

References (13)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.