A lateral field excited sensor array on a single piezoelectric substrate

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2006, Pages 876-879

  Wark, Mitchell ^a   Winters, Shane ^a   York, Chris ^a   Pinkham, Wade ^a   Bernhardt, George ^a   Vetelino, John F ^a  

^a UNIVERSITY OF MAINE   (United States)

Author keywords

Bulk acoustic wave sensor array; Lateral field excited; X axis inversion

Indexed keywords

ACOUSTIC ENERGY; BULK ACOUSTIC WAVE SENSORS; BULK ACOUSTIC WAVES; HEAT TREATING; HEAT TREATMENT PROCESS; LATERAL FIELD EXCITED; MULTI-PARAMETER SENSOR; PIEZOELECTRIC CRYSTALS; PIEZOELECTRIC SUBSTRATES; QCM SENSORS; SENSING APPLICATIONS; SENSING AREAS; SENSING ELEMENTS; SENSING SURFACE; TRANSVERSE SHEAR; X-AXIS INVERSION;

ACOUSTIC WAVES; ACOUSTICS; ELECTRODES; HEAT TREATMENT; PIEZOELECTRICITY; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; SENSOR ARRAYS;

SUBSTRATES;

EID: 50049131456     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2006.236     Document Type: Conference Paper

References (4)

1. Y. Hu, L. A. French Jr., K. Radecsky, M. Pereira da Cunha, P. Millard, and J. F. Vetelino. "A Lateral Field Excited Liquid Acoustic Wave Sensor." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 15, No. 11, pp. 1373-1380, November 2004
2. T. Uno. "Acoustic Wave Devices Using Artificial Twin Quartz Plates." Jpn. J. Appl. Phys., Vol. 35, pp. 2975-2979, 1996
3. S. Noge, E. Kamiyama, Y. Ueoka and T. Uno. "Monolithic Integration of AT-Cut Resonators Using Artificial Twin Quartz Plate." 1997 IEEE Ultrasonics Symposium, pp. 1043-1046
4. J. Rabe, S. Buttgenbach, J. Schroder, P. Hauptmann. "Monolithic Miniaturized Quartz Microbalance Array and Its Application to Chemical Sensor Systems for Liquids." IEEE Sensors Journal, Vol.3, No.4, pp. 361-368, 2003.