Monolithic integration of AT-cut resonators using artificial twin quartz plate

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 1997, Pages 1043-1046

  Noge, S ^a   Kamiyama, E ^a   Ueoka, Y ^a   Uno, T ^a  

^a KANAGAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC ARRAYS; ATTENUATION; ELASTIC WAVES;

ARTIFICIAL TWIN QUARTZ PLATES;

ACOUSTIC RESONATORS;

EID: 0031363644     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)