Optofluidic maskless lithography system

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1569-1572

  Chung, Su E ^a   Park, Wook ^a   Park, Hyunsung ^a   Yu, Kyoungsik ^b   Park, Namkyoo ^a   Kwon, Sunghoon ^a  

^a Seoul National University   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Maskless lithography; Microfluidics; Optofluidics; Polymer bead

Indexed keywords

ACTUATORS; CONTROL SYSTEMS; FLUIDIC DEVICES; MICROOPTICS; MICROSYSTEMS; NANOFLUIDICS; SENSORS; TRANSDUCERS;

INTERNATIONAL CONFERENCES; MASKLESS LITHOGRAPHY; MICRO FLUIDIC SYSTEMS; MICRO-FLUIDIC CHANNELS; MICRO-WIRES; MICROFLUIDICS; OPTOFLUIDICS; POLYMER BEAD; POLYMER MICROPARTICLES; POLYMERIC MICROSTRUCTURES; SOLID-STATE SENSORS; SPATIAL CONTROL;

LITHOGRAPHY;

EID: 50049122659     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300446     Document Type: Conference Paper

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