A simple optical gas sensor based on micromachined silicon plasma igniters and image processing

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 995-998

  Phommahaxay, Alain ^a   Lissorgues, Gaëlle ^a   Rousseau, Lionel ^a   Perrais, Vincent ^a   Français, Olivier ^b   Bourouina, Tarik ^a   Nicole, Pierre ^c  

^a ESIEE PARIS   (France)

^b University of Paris Cité   (France)

^c THALES   (France)

Author keywords

Gas sensor; Glow discharge; Image processing; Silicon electrode

Indexed keywords

ACTUATORS; CHEMICAL SENSORS; DIGITAL IMAGE STORAGE; ELECTRIC DISCHARGES; GAS DETECTORS; GLOW DISCHARGES; IMAGE PROCESSING; IMAGING SYSTEMS; IMAGING TECHNIQUES; IONIZATION OF GASES; METALLIZING; MICROSYSTEMS; NONMETALS; OPTICAL DATA PROCESSING; OPTICAL DESIGN; PHOTOIONIZATION; PLASMAS; SENSORS; SILICON; TRANSDUCERS;

CHEMICAL SPECIES; ELECTRICAL FIELDS; ELECTRODE ARRAYS; ELECTROSTATIC SIMULATIONS; GAS SENSOR; GAS SENSORS; GLASS SUBSTRATES; GLOW DISCHARGE; INTERNATIONAL CONFERENCES; MICROMACHINED SILICON; OPTICAL DETECTION; OPTICAL-; PLASMA IGNITION; SILICON ELECTRODE; SOLID-STATE SENSORS;

OPTICAL SENSORS;

EID: 50049098017     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300300     Document Type: Conference Paper

References (3)

1. N. Sillon, R. Baptist, "Micromachined mass spectrometer", Sensors and Actuators B, vol. 83, pp. 129-137, 2002.
2. J.-M. Torres, R. S. Dhariwal, "Electric field breakdown at micrometer separations", Nanotechnology, vol. 10, pp. 102-107, 1999.
3. th IEEE International Conference on Micro Electro Mechanical Systems, pp. 794-797, January 2005, Miami, USA.