Novel in-plane polarized PZT film based ultrasonic micro-acoustic device

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1291-1294

  Zhu, Yi Ping ^a   Ren, Tian Ling ^a   Wang, Chao ^a   Wang, Zhe Yao ^a   Liu, Li Tian ^a   Li, Zhi Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

In plane polarization; Interdigitated (IDT) electrodes; Lead zirconate titanate (PZT); Ultrasonic micro acoustic device

Indexed keywords

ACOUSTICS; ACTUATORS; MICROSYSTEMS; OPTICAL DESIGN; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; SENSORS; TRANSDUCERS; ULTRASONICS;

APPLICATIONS.; IN-PLANE; IN-PLANE POLARIZATION; INTERDIGITATED (IDT) ELECTRODES; INTERNATIONAL CONFERENCES; LEAD ZIRCONATE TITANATE (PZT); PZT FILMS; SOLID-STATE SENSORS; TESTING RESULTS; ULTRASONIC MICRO-ACOUSTIC DEVICE;

ACOUSTIC DEVICES;

EID: 50049086934     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300374     Document Type: Conference Paper

References (5)

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4. B. Xu, et al., "Sensing Characteristics of In-Plane Polarized Lead Zirconate Titanate Thin Films", Appl. Phys. Lett., vol. 75, pp. 4180-4182, 1999.
5. H. G. Yu, et al., "Lead Zirconate Titanate MEMS Accelerometer Using Interdigitated Electrodes", Sensor. Actual A., vol. 107, pp. 26-35, 2003.