Transparent conductive titanium-doped indium oxide films prepared by a magnetic null discharge sputter source

Vacuum

Volumn 83, Issue 1, 2008, Pages 161-165

  Sung, Youl Moon ^a   Han, Deok Woo ^a  

^a Kyungsung University   (South Korea)

Author keywords

Dye sensitized solar cells; Magnetic null discharge sputtering; Titanium doped indium oxide; Transparent conducting oxide

Indexed keywords

CONDUCTIVE FILMS; DISCHARGE (FLUID MECHANICS); FILM PREPARATION; INDIUM; SPUTTERING; THICK FILMS; TITANIUM; TITANIUM OXIDES;

DYE-SENSITIZED SOLAR CELLS; INDIUM OXIDE; INDIUM OXIDE FILMS; MAGNETIC NULL; MAGNETIC NULL DISCHARGE SPUTTERING; MINIMUM RESISTIVITY; SODA-LIME GLASS; THIN FILMS; TITANIUM-DOPED INDIUM OXIDE; TRANSPARENT CONDUCTING OXIDE;

OXIDE FILMS;

EID: 49949119445     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.079     Document Type: Article

References (12)

1. Kay A., and Grätzel M. Sol Energy Mater Sol Cells 44 (1996) 99
2. O'Regan B., and Grätzel M. Nature 353 (1991) 737
3. Gómez M., Lu J., Olsson E., Hagfeldt A., and Granqvist C.G. Sol Energy Mater Sol Cells 64 (2000) 385
4. Delahoy A.E., Chen L., Akhtar M., Sang B., and Guo S. Sol Energy 77 (2004) 785
5. Sung Y.-M., Okraku-Yirenkyi Y., Otsubo M., Honda C., Uchino K., and Muraoka K. IEEE Trans Plasma Sci 30 (2002) 142
6. Sung Y.M., Otsubo M., and Honda C. Surf Coat Technol 172 (2003) 178
7. Sung Y.M. J Electr Eng Technol 2 (2007) 532
8. Sung Y.M., Uchino K., Muraoka K., and Sakoda T. J Vac Sci Technol B 18 (2000) 2149
9. Kim H.-J., Jeon J.-A., Sung Y.-M., Yun M.-S., and Choi J.-Y. J Electr Eng Technol 1 (2006) 251
10. Hambergend I., and Granquist C.G. J Appl Phys 60 (1986) R123
11. Lin A.W.C., Armstrong N.R., and Kuwana T. Anal Chem 49 (1977) 1228
12. Hagfeldt A., Didriksson B., Palmqvist T., Lindström H., Södergren S., Rensmo H., et al. Sol Energy Mater Sol Cells 31 (1994) 481