Direct fabrication of super -fine wiring and bumping by using inkjet process

6th International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics, Polytronic 2007, Proceedings

Volumn , Issue , 2007, Pages 293-296

  Murata, Kazuhiro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Micro wiring; Micro bumps; Super fine inkjet

Indexed keywords

ADHESIVES; DEWATERING; DROP FORMATION; DROPS; ELECTRONICS INDUSTRY; FLUID MECHANICS; METAL DRAWING; METALS; MICROELECTRONICS; OPTICAL DESIGN; PHOTONICS; POLYMERS; TECHNOLOGY; THREE DIMENSIONAL;

CONDUCTIVE PASTES; CURRENT PACKAGING; DIRECT FABRICATION; FINE PATTERN PROCESSING; INK-JET TECHNOLOGY; METAL WIRES; MICRO WIRING; MICRO-BUMPS; NANO-METAL PARTICLES; ROOM TEMPERATURES; SUPER-FINE INKJET; THREE-DIMENSIONAL STRUCTURING;

LAW ENFORCEMENT;

EID: 49949089387     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/POLYTR.2007.4339186     Document Type: Conference Paper

References (6)

1. Kazuhiro Murata, "New ink-jet technology for the formation of ultra fine dots less than 1/1000 the size of currently achieved -It is possible to produce ultrafine wiring of a few microns in width on the desktop-",AIST pressrelease, 2002. http://www.aist.go.jp/aist_e/new_research/20020401/20020401. html
2. Kazuhiro Murata, "Super-fine ink-jet printing for nanotechnology", Proceedings of the International Conference on MEMS, Nano and Smart Systems (ICMENS'03), 346-349, 2003
3. Kazuhiro Murata, J. Matsumoto, A. Tezuka, Y. Matsuba and H. Yokoyama, "Super-fine ink-jet printing -toward the minimal manufacturing system-", Proceedings of the Symposium on Design, Test, Integration Package of MEMS/MOEMS (DTIP'2004), 249-253, 2004
4. Kazuhiro Murata: "Fine pitch mocro-bumps and micro-wires printed by super injet technology", Proceedings of International Conference on Electronics Packaging (ICEP 2005), 269-272, 2005
5. Harima Chemical Inc., The details of the Nanopaste™. http://www.harima.co.jp/products/electronics/e_series_frame.html
6. Yorishige Matsuba: "Direct Patterning Using Metal Nano-Particles", Journal of Japan Institute of Electronics Packaging, Vol.6, No.2, 130-135, 2003