A hybrid RF MEMS probe array system with a SP3T RF MEMS silicon switch for permittivity measurement

Journal of Micromechanics and Microengineering

Volumn 18, Issue 8, 2008, Pages

  Kim, Jung Mu ^a   Cheon, Changyul ^b   Kwon, Youngwoo ^c   Kim, Yong Kweon ^c  

^a Chonbuk National University   (South Korea)

^b University of Seoul   (South Korea)

^c Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; COMPRESSIVE STRESS; MEMS; NONMETALS; OPTICAL DESIGN; PERMITTIVITY; PERMITTIVITY MEASUREMENT; SILICON; WIRE;

BOND WIRES; COLE-COLE EQUATIONS; MEAS URED RESULTS; MEMS DEVICES; MICROMACHINED; PROBE ARRAYS; REFERENCE VALUES; RF MEMS; TRANSMISSION LINE; WIRE BONDING;

MICROELECTROMECHANICAL DEVICES;

EID: 49749136988     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/8/085006     Document Type: Article

References (11)

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10. http://www.dow.com
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