In vitro measurement using a MEMS probe array with five-strip lines for permittivity measurement

Journal of Micromechanics and Microengineering

Volumn 16, Issue 1, 2006, Pages 173-179

  Kim, Jung Mu ^a   Oh, Dong Hoon ^b   Baek, Chang Wook ^c   Cho, Jei Won ^a   Kwon, Youngwoo ^a   Cheon, Changyul ^b   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

^b University of Seoul   (South Korea)

^c Chung Ang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; MACHINING; MICROSTRIP LINES; PERMITTIVITY MEASUREMENT; PROBES; STRIP TELECOMMUNICATION LINES;

BIOLOGICAL MEASUREMENTS; BIOLOGICAL PROPERTIES; PLANAR CIRCUITS; SURFACE MACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 29144509850     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/1/023     Document Type: Article

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