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Volumn 14, Issue SUPPL. 2, 2008, Pages 284-285
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3D characterization and metrology of nanostructures by electron tomography
a,b
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 49549104645
PISSN: 14319276
EISSN: 14358115
Source Type: Journal
DOI: 10.1017/S1431927608087394 Document Type: Conference Paper |
Times cited : (1)
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References (5)
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