Low-temperature growth of carbon nanotube by thermal chemical vapor deposition with FeZrN catalyst

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 4, 2004, Pages 1834-1837

  Shiroishi, Tetsuya ^a   Sawada, Takao ^a   Hosono, Akihiko ^a   Nakata, Shuhei ^a   Kanazawa, Yasunori ^b   Takai, Mikio ^b  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; ELECTRIC FIELDS; FIELD EMISSION DISPLAYS; GLASS; HEAT TREATMENT; IRON COMPOUNDS; LOW TEMPERATURE EFFECTS; MICROSTRUCTURE; SPUTTERING; SYNTHESIS (CHEMICAL); TRIODES;

CRYSTALLOIDS; LOW TEMPERATURE GROWTH; SODA LIME GLASS; THERMAL CHEMICAL VAPOR DEPOSITION;

CARBON NANOTUBES;

EID: 4944257943     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1772368     Document Type: Article

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