Nanoindentation of polycrystalline silicon-carbide thin films studied by acoustic emission

Applied Physics Letters

Volumn 85, Issue 10, 2004, Pages 1695-1697

  Ma, X G ^a   Komvopoulos, K ^a   Bogy, D B ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT LOADING; ELASTIC ENERGY; INDENTERS; NANOINDENTATION;

ACOUSTIC EMISSIONS; DATA ACQUISITION; DEFORMATION; FREQUENCIES; FRICTION; INDENTATION; MICROSTRUCTURE; POLYSILICON; SILICON CARBIDE; THIN FILMS; TIME DOMAIN ANALYSIS; WAVEFORM ANALYSIS;

NANOTECHNOLOGY;

EID: 4944253923     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1784880     Document Type: Article

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